Title:Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMSAuthor(s):Tobias Frischmuth, Michael Schneider, Daniel Maurer, Thomas Grille, Ulrich SchmidJournal:Sensors and Actuators A: PhysicalISSN:0924-4247Page Reference:9 page(s)Publishing:2016