Title:Influence of High Temperature Annealings on a-SiC:H Thin Film PropertiesAuthor(s):Tobias Frischmuth, David Dergez, Marko Stübegger, Ursula Hedenig, Thomas Grille, Ulrich SchmidBooktitle:Smart Systems IntegrationPage Reference:page 475-478, 4 page(s)Publishing:3/2014