Title:Concept Study on an Electrodynamically Driven and Read-Out Torsional OscillatorAuthor(s):Martin Heinisch, Thomas Voglhuber-Brunnmaier, Erwin Reichel, Stefan Clara, Ali Abdallah, Bernhard JakobyAbstract:In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.Booktitle:Proceedings of the Microelectronic Systems Symposium 2014Page Reference:5 page(s)Publishing:5/2014