Title:Direct Determination of the Volumetric Heat Capacity of Liquids using a MEMS Sensor and Efficient Evaluation MethodsAuthor(s):Roman Beigelbeck, Samir Cerimovic, Franz Kohl, Thomas Voglhuber-Brunnmaier, Bernhard JakobyAbstract:In Beigelbeck et al [Meas. Sci. Technol. 22 105407, 2011], we presented a MEMS sensor containing two thin-film thermistors symmetrically arranged around a resistive heater and an associated measurement procedure to consecutively determine the thermal diffusivity and conductivity of liquids. In this contribution, we report an improved sensor design combined with two novel measurement methods featuring several distinctive advantages. First, the multi-bridge design enables up to four times faster acquisition of the required temperature-frequency response. Secondly, a newly developed AC-based measurement method facilitates direct determination of the volumetric heat capacity cV of liquids which is an essential task in many condition monitoring applications. Thirdly, a novel impulse response approach allows rapid acquisition of cV. Besides the sensor device, we present an analytical model for the basic sensing principle, both measurement methods, and sample measurements performed on selected liquids.Booktitle:Proceedings IEEE SensorsPage Reference:4 page(s)Publishing:2014