Title:Characterization and Calibration of U-Shaped Mass Density and Viscosity Sensors by an Analytical Modeling ApproachAuthor(s):Martin Heinisch,  Erwin Reichel,  Thomas Voglhuber-Brunnmaier,  Bernhard JakobyAbstract:This contribution is about resonant viscosity and mass density sensors based on oscillating U-shaped structures which are operated at their fundamental resonance frequencies. The actuation and read-out for both types of sensors are based on Lorentz forces. The measuring principle, the device setups, complete analytical models relating the (known) input to the (measured) output signals as well as first measurements obtained with the discussed devices are presented.Booktitle:The 17th International Conference on Solid-State Sensors, Actuators and MicrosystemsPublisher:IOP PublishingISBN:978-1-4673-5981-8Page Reference:page 1448, 4 page(s)Publishing:2013

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