Title:Wire Based and Micromachined U-Shaped Cantilever Devices for Viscosity and Mass Density Sensing for Measurements in a Frequency Range of 100 Hz TO 100 KHzAuthor(s):Martin Heinisch, Erwin Reichel, Thomas Voglhuber-Brunnmaier, Wilfried Hortschitz, Michael Stifter, Johannes Schalko, Etienne Lemaire, Isabelle Dufour, Bernhard JakobyBooktitle:Proceedings of the 10th international workshop on nanomechanical sensingPage Reference:page 83-84, 2 page(s)Publishing:5/2013