Title:Density sensor for application in a gas phase polymerization process based on quartz crystal resonatorsAuthor(s):Johannes Kilian Sell, Alexander Niedermayer, Bernhard JakobyAbstract:We investigate a gas density sensor based on quartz crystal resonators for high pressure (2.5 × 106 Pa) and high temperature (340 K) application. Flexural resonators, e.g. tuning fork resonators, have successfully been used for density measurement of pure gases. In our contribution, they are evaluated with respect to their sensitivity to gas density for the target application in a polymerization reactor, involving high ambient pressures and temperatures. Moreover, a density sensor for density measurements in unknown gases and gas mixtures, based on two tuning forks, is presented. It is shown that an pressure induced frequency shift occurs which has to be considered at higher pressures for accurate density measurement.Booktitle:Tagungsband zur Informationstagung Mikroelektronik 10Editor(s):Erich Gornik, Christoph Grimm, Bernhard Jakoby, Karl Riedling, Erwin SchoitschPage Reference:5 page(s)Publishing:2010Number:56