Title:Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase SensingAuthor(s):Frieder Lucklum,  Bernhard JakobyAbstract:Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of non-contact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.Journal:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency ControlEditor(s):IEEEISSN:0885-3010Page Reference:page 1000-1002, 3 page(s)Publishing:5/2010Volume:57Number:5

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