Title:Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometerAuthor(s):Bernd Arminger,  Bernhard ZagarAbstract:In our proposed paper we present a technique for characterising the piezo–driven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is introduced and verified by the experimental results. Also guidance for an online or offline correction of the sensors position is presented.Booktitle:Scanning Microscopy 2009Page Reference:9 page(s)Publishing:2009

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