Title:A Measurement Setup for Sensing Viscosity and Mass Density of Liquids Accomodating Different Resonator Sensor PrinciplesAuthor(s):Andreas Auinger, Frieder Lucklum, Erwin Reichel, Bernhard JakobyAbstract:In this work we present a novel experimental setup for measuring liquid properties utilizing three different acoustic sensors. We compare the applicability and associated measurement results for electromagnetically excited cantilever and membrane or plate resonators, as well as a quartz crystal resonator. This work aims at comparing the characteristics of these different sensor principles. The setup combines suitable liquid reservoirs for all three sensors in a temperature-stabilized environment.Booktitle:Tagungsband zur Informationstagung Mikroelektronik 08Editor(s):OVEISBN:978-3-85133-049-6Page Reference:page 164-168, 5 page(s)Publishing:10/2008Series:OVE SchriftenreiheNumber:50