Concept Study on an Elecrtrodynamically Driven and Read-Out Torsional Oscillator
Sprache des Vortragstitels:
Englisch
Original Tagungtitel:
Microelectronic Systems Symposium
Sprache des Tagungstitel:
Englisch
Original Kurzfassung:
In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.