Moritz Brehm, Gunther Springholz,
"Gettering and Defect Engineering in Semiconductor Technology (GADEST 2022)"
, in Physica Status Solidi A: Applications and Materials Science, Vol. 219, Wiley-VCH GmbH, Seite(n) 2200562, 2022
Original Titel:
Gettering and Defect Engineering in Semiconductor Technology (GADEST 2022)
Sprache des Titels:
Englisch
Journal:
Physica Status Solidi A: Applications and Materials Science