Novel Micromachined Vibrating Beam Sensor for the Viscosity Measurement of Complex Liquids
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Tagungsband zur Informationstagung Mikroelektronik 08
In this work we present a novel experimental setup for measuring liquid properties utilizing three different acoustic sensors. We compare the applicability and associated measurement results for electromagnetically excited cantilever and membrane or plate resonators, as well as a quartz crystal resonator. This work aims at comparing the characteristics of these different sensor principles. The setup combines suitable liquid reservoirs for all three sensors in a temperature-stabilized environment.