Erwin Reichel, Christian Riesch, Bernhard Weiß, Franz Keplinger, Bernhard Jakoby,
"Measurement of Liquid Properties Using a Vibrating Micromachined Clamped-Clamped Beam Structure"
, in AMA Service GmbH: Proc. SENSOR Conference, Nürnberg, May 2007, Vol. II, Seite(n) 33-38, 2007, ISBN: 978-3-9810993-2-4
Original Titel:
Measurement of Liquid Properties Using a Vibrating Micromachined Clamped-Clamped Beam Structure
Sprache des Titels:
Englisch
Original Buchtitel:
Proc. SENSOR Conference, Nürnberg, May 2007
Original Kurzfassung:
In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquid’s influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout.